Publication:

Poly-Si heaters for ultra-fast local temperature control of on-wafer test structures

Date

2014
Journal article
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dc.contributor.authorFranco, Jacopo
dc.contributor.authorKaczer, Ben
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.accessioned2021-10-22T01:31:14Z
dc.date.available2021-10-22T01:31:14Z
dc.date.embargo9999-12-31
dc.date.issued2014
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23829
dc.identifier.urlhttp://dx.doi.org/10.1016/j.mee.2013.09.013
dc.source.beginpage47
dc.source.endpage51
dc.source.journalMicroelectronic Engineering
dc.source.volume114
dc.title

Poly-Si heaters for ultra-fast local temperature control of on-wafer test structures

dc.typeJournal article
dspace.entity.typePublication
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