Publication:
ATLAS simulations of delta-doped Si/SiGe backward diodes
Date
| dc.contributor.author | Fakhimi, Parastou | |
| dc.contributor.author | Growden, Tyler | |
| dc.contributor.author | Berger, Paul | |
| dc.date.accessioned | 2021-10-23T10:47:06Z | |
| dc.date.available | 2021-10-23T10:47:06Z | |
| dc.date.issued | 2016-11 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26608 | |
| dc.source.beginpage | 54 | |
| dc.source.conference | JSPS - FZ-Jülich Workshop on "Atomically Controlled Processing for Ultra-large Scale Integration" | |
| dc.source.conferencedate | 24/11/2016 | |
| dc.source.conferencelocation | Jülich Germany | |
| dc.source.endpage | 55 | |
| dc.title | ATLAS simulations of delta-doped Si/SiGe backward diodes | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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