Publication:
Challenges of UV curing of low-k materials: Effect of wavelength
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Marsik, Prema | |
| dc.date.accessioned | 2021-10-17T21:19:24Z | |
| dc.date.available | 2021-10-17T21:19:24Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14936 | |
| dc.source.conference | 9th International Seminar "Porous Glasses - Special Glasses" | |
| dc.source.conferencedate | 1/09/2009 | |
| dc.source.conferencelocation | Wroclaw Poland | |
| dc.title | Challenges of UV curing of low-k materials: Effect of wavelength | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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