Plasma-enhanced atomic layer seposition of two-dimensional WS2 from WF6, H2 plasma, and H2S

Groven, Benjamin; Heyne, Markus; Nalin Mehta, Ankit; Bender, Hugo; Nuytten, Thomas; Meersschaut, Johan; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies

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Plasma-enhanced atomic layer seposition of two-dimensional WS2 from WF6, H2 plasma, and H2S

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2017

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Vandervorst, Wilfried

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Chemistry of Materials

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Acq. date: 2026-08-10

Plasma-enhanced atomic layer seposition of two-dimensional WS2 from WF6, H2 plasma, and H2S

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