Publication:
Active area oxidation during the densification of shallow trench isolation for sub-0.25 micron CMOS
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2006 since deposited on 2021-09-30
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Acq. date: 2026-04-27
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Statistics
Views
2006 since deposited on 2021-09-30
1last month
Acq. date: 2026-04-27
Citations