Publication:

In-line electrical characterization of furnace and plasma and plasma nitrided gate dielectric films

Date

2002
Presentation
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dc.contributor.authorEason, K.
dc.contributor.authorPassefort, Sophie
dc.contributor.authorZhang, X.
dc.contributor.authorCubaynes, Florence
dc.contributor.authorSchaekers, Marc
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-14T21:34:19Z
dc.date.available2021-10-14T21:34:19Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6299
dc.source.conference5th Technical and Scientific Meeting of CREMSI: New Tools and Processes for Thin Active Layers in the Advanced FEOL Techniques
dc.source.conferencedate14/11/2002
dc.source.conferencelocationFuveau France
dc.title

In-line electrical characterization of furnace and plasma and plasma nitrided gate dielectric films

dc.typeOral presentation
dspace.entity.typePublication
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