Publication:

Study of the altered layer formation under oxygen bombardment in combination with flooding

Date

1994
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorElst, Kathy
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorBender, Hugo
dc.contributor.authorAlay, Josep Lluis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-09-29T12:41:09Z
dc.date.available2021-09-29T12:41:09Z
dc.date.embargo9999-12-31
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/149
dc.source.beginpage617
dc.source.conferenceSecondary Ion Mass Spectrometry - SIMS IX. Proceedings of the 9th International Conference
dc.source.conferencedate7/11/1993
dc.source.conferencelocationYokohama Japan
dc.source.endpage620
dc.title

Study of the altered layer formation under oxygen bombardment in combination with flooding

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
141.pdf
Size:
177.2 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions