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Low track height standard-cells enable high-placement density and low-BEOL cost

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dc.contributor.authorDebacker, Peter
dc.contributor.authorMattii, Luca
dc.contributor.authorSherazi, Yasser
dc.contributor.authorBaert, Rogier
dc.contributor.authorGerousis, Vassilios
dc.contributor.authorNauts, Claire
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorRyckaert, Julien
dc.contributor.authorKim, Ryan Ryoung han
dc.contributor.authorVerkest, Diederik
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorSherazi, Yasser
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorKim, Ryan Ryoung han
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.accessioned2021-10-24T04:02:56Z
dc.date.available2021-10-24T04:02:56Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28186
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2626124
dc.source.beginpage1014803
dc.source.conferenceDesign-Process-Technology Co-optimization for Manufacturability XI
dc.source.conferencedate26/02/2017
dc.source.conferencelocationSan Jose, CA USA
dc.title

Low track height standard-cells enable high-placement density and low-BEOL cost

dc.typeProceedings paper
dspace.entity.typePublication
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