Publication:

Back-channel-etch process flow for a-IGZO TFTs

Date

2013

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Steudel, Soeren

;

Vaisman Chasin, Adrian

;

;

Rockele, Maarten

;

Bhoolokam, Ajay

;

Willegems, Myriam

;

;

;

;

;

;

Groeseneken, Guido

;

Statistics

2016 since deposited on 2021-10-21

Acq. date: 2026-02-24