Publication:

Back-channel-etch process flow for a-IGZO TFTs

Date

2013

Proceedings Paper

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Author(s)

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Steudel, Soeren

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Vaisman Chasin, Adrian

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Rockele, Maarten

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Bhoolokam, Ajay

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Willegems, Myriam

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Groeseneken, Guido

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2024 since deposited on 2021-10-21

Acq. date: 2026-09-11