Publication:

Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics

Date

2019
Journal article
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dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorStassen, Ivo
dc.contributor.authorStassin, Timothee
dc.contributor.authorCruz, Alexander John
dc.contributor.authorOkudur, Oguzhan Orkut
dc.contributor.authorArmini, Silvia
dc.contributor.authorWilson, Chris
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorAmeloot, Rob
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorStassen, Ivo
dc.contributor.imecauthorStassin, Timothee
dc.contributor.imecauthorCruz, Alexander John
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-27T11:48:20Z
dc.date.available2021-10-27T11:48:20Z
dc.date.embargo9999-12-31
dc.date.issued2019
dc.identifier.issn2041-1723
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/33335
dc.identifier.urlhttps://doi.org/10.1038/s41467-019-11703-x
dc.source.beginpage3729
dc.source.journalNature Communications
dc.source.volume10
dc.title

Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics

dc.typeJournal article
dspace.entity.typePublication
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