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Diode analysis of advanced processing modules for deep-submicrometer CMOS technology nodes

Date

2003
Journal article
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dc.contributor.authorPoyai, Amporn
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorRooyackers, Rita
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-15T06:15:10Z
dc.date.available2021-10-15T06:15:10Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8038
dc.source.beginpageG795
dc.source.endpageG806
dc.source.issue12
dc.source.journalJournal of the Electrochemical Society
dc.source.volume150
dc.title

Diode analysis of advanced processing modules for deep-submicrometer CMOS technology nodes

dc.typeJournal article
dspace.entity.typePublication
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