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Dielectrics as key enablers of today's and tomorrow's semiconductor technology

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dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-26T06:50:27Z
dc.date.available2021-10-26T06:50:27Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/32050
dc.source.conferenceTechnologies for Oxide Electronics School
dc.source.conferencedate15/03/2018
dc.source.conferencelocationSant Feliu de Giuxols Spain
dc.title

Dielectrics as key enablers of today's and tomorrow's semiconductor technology

dc.typeOral presentation
dspace.entity.typePublication
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