Publication:

Investigation of leakage mechanisms in ALD Sr-rich SrTiO films

Date

2010
Proceedings Paper
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dc.contributor.authorKaczer, Ben
dc.contributor.authorWang, W. C.
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorPawlak, Malgorzata
dc.contributor.authorKim, Min-Soo
dc.contributor.authorTomida, Kazuyuki
dc.contributor.authorDebusschere, Ingrid
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorAltimime, Laith
dc.contributor.authorKittl, Jorge
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorTomida, Kazuyuki
dc.contributor.imecauthorDebusschere, Ingrid
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-18T17:28:23Z
dc.date.available2021-10-18T17:28:23Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17338
dc.source.conference41st IEEE Semiconductor Interface Specialists Conference- SISC
dc.source.conferencedate2/12/2010
dc.source.conferencelocationSan Diego, CA USA
dc.title

Investigation of leakage mechanisms in ALD Sr-rich SrTiO films

dc.typeProceedings paper
dspace.entity.typePublication
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