Publication:
Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process
| dc.contributor.author | Li, Yingying | |
| dc.contributor.author | Bleiker, Simon J. | |
| dc.contributor.author | Worsey, Elliott | |
| dc.contributor.author | Dagon, Mael | |
| dc.contributor.author | Edinger, Pierre | |
| dc.contributor.author | Takabayashi, Alain Yuji | |
| dc.contributor.author | Quack, Niels | |
| dc.contributor.author | Verheyen, Peter | |
| dc.contributor.author | Bogaerts, Wim | |
| dc.contributor.author | Gylfason, Kristinn B. | |
| dc.contributor.author | Pamunuwa, Dinesh | |
| dc.contributor.author | Niklaus, Frank | |
| dc.contributor.imecauthor | Verheyen, Peter | |
| dc.contributor.imecauthor | Bogaerts, Wim | |
| dc.contributor.orcidimec | Verheyen, Peter::0000-0002-8245-9442 | |
| dc.contributor.orcidimec | Bogaerts, Wim::0000-0003-1112-8950 | |
| dc.date.accessioned | 2025-07-20T03:57:03Z | |
| dc.date.available | 2025-07-20T03:57:03Z | |
| dc.date.issued | 2025-JUL 11 | |
| dc.description.wosFundingText | This project has received funding from the European Union's Horizon 2020 research and innovation program under grant No. 780283 (MORPHIC), 101070332 (PHORMIC), 871740 (ZeroAMP), as well as the i-EDGE project, funded by the European Union (No. 101092018), the Swiss State Secretariat for Education, Research and Innovation (SERI No. 10061130) and UK Research and Innovation (UKRI No. 10063023). | |
| dc.identifier.doi | 10.1038/s41378-025-00964-w | |
| dc.identifier.issn | 2055-7434 | |
| dc.identifier.pmid | MEDLINE:40645929 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45917 | |
| dc.publisher | SPRINGERNATURE | |
| dc.source.issue | 1 | |
| dc.source.journal | MICROSYSTEMS & NANOENGINEERING | |
| dc.source.numberofpages | 11 | |
| dc.source.volume | 11 | |
| dc.subject.keywords | ELECTRO-MECHANICAL SWITCHES | |
| dc.subject.keywords | RELAY TECHNOLOGY | |
| dc.subject.keywords | RELIABILITY | |
| dc.subject.keywords | DESIGN | |
| dc.title | Volatile and non-volatile nano-electromechanical switches fabricated in a CMOS-compatible silicon-on-insulator foundry process | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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