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Articles
SiGe based grating light valves: a leap towards monolithic integration of MOEMS
Publication:
SiGe based grating light valves: a leap towards monolithic integration of MOEMS
Date
2010
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rudra, Sukumar
;
Roels, Joris
;
Bryce, George
;
Haspeslagh, Luc
;
Witvrouw, Ann
;
Van Thourhout, Dries
Journal
Microelectronic Engineering
Abstract
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1839
since deposited on 2021-10-18
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item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1839
since deposited on 2021-10-18
420
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations