Publication:
Applicability of HF solutions for the cleaning of TiSi2 surface
Date
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Vanhaelemeersch, Serge | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Vanhaelemeersch, Serge | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.orcidimec | Vanhaelemeersch, Serge::0000-0003-2102-7395 | |
| dc.date.accessioned | 2021-09-30T07:55:39Z | |
| dc.date.available | 2021-09-30T07:55:39Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1718 | |
| dc.source.beginpage | 110 | |
| dc.source.conference | Materials for Advanced Metallization. MAM'97 Abstracts Booklet; European Workshop Materials for Advanced Metallization. MAM'97 A | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 112 | |
| dc.title | Applicability of HF solutions for the cleaning of TiSi2 surface | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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