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Low Energy Ion Scattering (LEIS) analysis of ultra-thin Ru layers on Ta- or Mn-based barriers

Date

2015
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dc.contributor.authorBrüner, Philipp
dc.contributor.authorGrehl, T.
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorSteinbauer, E.
dc.contributor.authorBauer, P.
dc.contributor.authorBrongersma, H.
dc.contributor.imecauthorJourdan, Nicolas
dc.date.accessioned2021-10-22T18:35:43Z
dc.date.available2021-10-22T18:35:43Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25022
dc.source.conference15th International Conference on Atomic Layer Deposition - ALD
dc.source.conferencedate28/06/2015
dc.source.conferencelocationPortland, OR USA
dc.title

Low Energy Ion Scattering (LEIS) analysis of ultra-thin Ru layers on Ta- or Mn-based barriers

dc.typeMeeting abstract
dspace.entity.typePublication
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