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Effects on the HE implantation energy on the strain relaxation of epitaxial Si0.8Ge0.2/Si(100) heterostructures

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1912 since deposited on 2021-10-15
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Acq. date: 2026-08-06

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1912 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-08-06

Citations