Publication:
Study of ALD on porous low-k
Date
| dc.contributor.author | Verdonck, Patrick | |
| dc.contributor.imecauthor | Verdonck, Patrick | |
| dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
| dc.date.accessioned | 2021-10-19T20:56:56Z | |
| dc.date.available | 2021-10-19T20:56:56Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/20049 | |
| dc.source.conference | Metryx seminar at IITC | |
| dc.source.conferencedate | 10/05/2011 | |
| dc.source.conferencelocation | Dresden Germany | |
| dc.title | Study of ALD on porous low-k | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |