Publication:
Electrical evaluation of stiction during drying of high aspect ratio nanostructures
Date
| dc.contributor.author | Pacco, Antoine | |
| dc.contributor.author | Wada, M. | |
| dc.contributor.imecauthor | Pacco, Antoine | |
| dc.date.accessioned | 2021-10-17T09:33:54Z | |
| dc.date.available | 2021-10-17T09:33:54Z | |
| dc.date.issued | 2008 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14263 | |
| dc.source.conference | 34th International Conference on Micro & Nano Engineering - MNE | |
| dc.source.conferencedate | 15/09/2008 | |
| dc.source.conferencelocation | Athens Greece | |
| dc.title | Electrical evaluation of stiction during drying of high aspect ratio nanostructures | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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