Publication:

ESD in FinFET technologies: past learning and emerging challenges

Date

2013
Proceedings Paper
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dc.contributor.authorLinten, Dimitri
dc.contributor.authorHellings, Geert
dc.contributor.authorChen, Shih-Hung
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorChen, Shih-Hung
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.date.accessioned2021-10-21T09:27:09Z
dc.date.available2021-10-21T09:27:09Z
dc.date.embargo9999-12-31
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22705
dc.source.beginpage2B.5
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate14/04/2013
dc.source.conferencelocationMonterey, CA USA
dc.title

ESD in FinFET technologies: past learning and emerging challenges

dc.typeProceedings paper
dspace.entity.typePublication
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