Publication:

Optical extensions towards the 45-nm node

Date

2004
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorHendrickx, Eric
dc.contributor.authorMonnoyer, Philippe
dc.contributor.authorVan Look, Lieve
dc.contributor.authorVandenberghe, Geert
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorVandenberghe, Geert
dc.date.accessioned2021-10-15T13:47:51Z
dc.date.available2021-10-15T13:47:51Z
dc.date.embargo9999-12-31
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9023
dc.source.beginpage357
dc.source.conferenceOptical Microlithography XVII
dc.source.conferencedate22/02/2004
dc.source.conferencelocationSanta Clara, CA USA
dc.source.endpage368
dc.title

Optical extensions towards the 45-nm node

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
8855.pdf
Size:
1.18 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions