Publication:
Metal contamination in semiconductor devices: a never ending story?
Date
| dc.contributor.author | Simoen, Eddy | |
| dc.contributor.author | Claeys, Cor | |
| dc.contributor.imecauthor | Simoen, Eddy | |
| dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
| dc.date.accessioned | 2021-10-26T03:53:26Z | |
| dc.date.available | 2021-10-26T03:53:26Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31782 | |
| dc.source.beginpage | 51 | |
| dc.source.conference | 8th Forum on the Science and Technology of Silicon Materials | |
| dc.source.conferencedate | 18/11/2018 | |
| dc.source.conferencelocation | Okayama Japan | |
| dc.source.endpage | 69 | |
| dc.title | Metal contamination in semiconductor devices: a never ending story? | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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