Publication:

Noise diagnostics of advanced silicon substrates and deep submicron process modules

Date

2003
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorSimoen, Eddy
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorClaeys, Cor
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.date.accessioned2021-10-15T06:40:20Z
dc.date.available2021-10-15T06:40:20Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8144
dc.source.beginpage420
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
dc.source.conferencedate28/04/2003
dc.source.conferencelocationParis France
dc.source.endpage439
dc.title

Noise diagnostics of advanced silicon substrates and deep submicron process modules

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
7277.pdf
Size:
1.08 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions