Publication:

Additive influence on filling microvias with copper

Date

2008
Presentation
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dc.contributor.authorLuhn, Ole
dc.contributor.authorRuythooren, Wouter
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.imecauthorRuythooren, Wouter
dc.contributor.imecauthorVan Hoof, Chris
dc.date.accessioned2021-10-17T08:35:32Z
dc.date.available2021-10-17T08:35:32Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14077
dc.source.conferenceGordon Research Conference
dc.source.conferencedate27/07/2008
dc.source.conferencelocationNew London, NH USA
dc.title

Additive influence on filling microvias with copper

dc.typeOral presentation
dspace.entity.typePublication
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