Publication:

Heterostructure at CMOS source/drain: contributor or alleviator to the high access resistance problem?

Date

2016
Proceedings Paper
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Author(s)

Yu, Hao  
;
Schaekers, Marc  
;
Rosseel, Erik  
;
Everaert, Jean-Luc
;
Eyben, Pierre  
;
Chiarella, Thomas  
;
Merckling, Clement  
;
Agarwal Kumar, Tarun
;
Pourtois, Geoffrey  
;
Hikavyy, Andriy  
;
Kubicek, Stefan  
;
Witters, Liesbeth  
;
Sibaja-Hernandez, Arturo  
;
Mitard, Jerome  
;
Waldron, Niamh  
;
Chew, Soon Aik
;
Demuynck, Steven  
;
Horiguchi, Naoto  
;
Barla, Kathy  
;
Thean, Aaron  
;
Mocuta, Anda
;
Mocuta, Dan
;
Collaert, Nadine  
;
De Meyer, Kristin  

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