Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Investigation on mc-Si bulk passivation using deuterated silicon-nitride
Publication:
Investigation on mc-Si bulk passivation using deuterated silicon-nitride
Date
2003
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Dekkers, Harold
;
De Wolf, Stefaan
;
Agostinelli, Guido
;
Szlufcik, Jozef
;
Pernau, T.
;
Arnoldbik, W.M.
;
Goldbach, H.D.
;
Schropp, R.E.I.
Journal
Abstract
Description
Metrics
Views
1960
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1960
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations