Publication:
Elastic recoil detection of hydrogen in combination with low energy argon sputtering
Date
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Deleu, Jeroen | |
| dc.contributor.author | Van Beeck, W. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-30T07:59:01Z | |
| dc.date.available | 2021-09-30T07:59:01Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1759 | |
| dc.source.conference | Ion Beam Analysis-13; 27 July - 1 August 1997; Lisboa, Portugal. | |
| dc.source.conferencelocation | ||
| dc.title | Elastic recoil detection of hydrogen in combination with low energy argon sputtering | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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