Publication:

IMEC's strategy and activity on MEMS

Date

2009
Presentation
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dc.contributor.authorPieters, Philip
dc.contributor.imecauthorPieters, Philip
dc.date.accessioned2021-10-18T01:43:29Z
dc.date.available2021-10-18T01:43:29Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16020
dc.source.conferenceSymposium 'The State of the Art of Integrated MEMS Technology for Industrialisation'
dc.source.conferencedate31/03/2009
dc.source.conferencelocationTsukuba Japan
dc.title

IMEC's strategy and activity on MEMS

dc.typeOral presentation
dspace.entity.typePublication
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