Publication:
Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0001-6711-7367 | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | 0000-0001-5528-1434 | |
| cris.virtual.orcid | 0000-0001-5919-7336 | |
| cris.virtual.orcid | 0000-0001-8136-5172 | |
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| cris.virtualsource.department | ee53fa57-629e-40d5-b433-6f4ba4220134 | |
| cris.virtualsource.department | 9797fc7c-c7f6-4749-9de8-954bb4c197ca | |
| cris.virtualsource.orcid | c494e08e-6e92-470e-b96b-d20dbbd419b3 | |
| cris.virtualsource.orcid | 181a2fc8-b567-4fcd-802e-7ac128e65742 | |
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| cris.virtualsource.orcid | ee53fa57-629e-40d5-b433-6f4ba4220134 | |
| cris.virtualsource.orcid | 9797fc7c-c7f6-4749-9de8-954bb4c197ca | |
| dc.contributor.author | Nicley, Shannon | |
| dc.contributor.author | Vanpoucke, Danny | |
| dc.contributor.author | Araujo, Daniel | |
| dc.contributor.author | Rouzbahani Bayatani, Rozita | |
| dc.contributor.author | Lloret, Fernando | |
| dc.contributor.author | Pobedinskas, Paulius | |
| dc.contributor.author | Haenen, Ken | |
| dc.contributor.imecauthor | Rouzbahani Bayatani, Rozita | |
| dc.contributor.imecauthor | Lloret, Fernando | |
| dc.contributor.imecauthor | Pobedinskas, Paulius | |
| dc.contributor.imecauthor | Haenen, Ken | |
| dc.contributor.orcidext | Araujo, Daniel::0000-0001-7448-1474 | |
| dc.contributor.orcidimec | Nicley, Shannon S.::0000-0002-5960-7873 | |
| dc.contributor.orcidimec | Vanpoucke, Danny E. P.::0000-0001-5919-7336 | |
| dc.contributor.orcidimec | Lloret, Fernando::0000-0002-6506-4027 | |
| dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
| dc.contributor.orcidimec | Pobedinskas, Paulius::0000-0001-8136-5172 | |
| dc.date.accessioned | 2022-06-20T09:58:27Z | |
| dc.date.available | 2021-11-02T16:07:03Z | |
| dc.date.available | 2022-06-20T09:58:27Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1016/j.carbon.2020.10.061 | |
| dc.identifier.issn | 0008-6223 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/38331 | |
| dc.publisher | PERGAMON-ELSEVIER SCIENCE LTD | |
| dc.source.beginpage | 463 | |
| dc.source.endpage | 473 | |
| dc.source.issue | na | |
| dc.source.journal | CARBON | |
| dc.source.numberofpages | 11 | |
| dc.source.volume | 172 | |
| dc.subject.keywords | CHEMICAL-VAPOR-DEPOSITION | |
| dc.subject.keywords | ELECTRICAL CHARACTERIZATION | |
| dc.subject.keywords | ELECTRONIC-PROPERTIES | |
| dc.subject.keywords | RAMAN-SPECTRA | |
| dc.subject.keywords | GROWTH-RATE | |
| dc.subject.keywords | THIN-FILMS | |
| dc.subject.keywords | CONDUCTIVITY | |
| dc.subject.keywords | TEMPERATURE | |
| dc.subject.keywords | SUBSTRATE | |
| dc.subject.keywords | MECHANISM | |
| dc.title | Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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