Publication:

Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers

Date

2021
Journal article
https://doi.org/10.1016/j.carbon.2020.10.061
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dc.contributor.authorNicley, Shannon
dc.contributor.authorVanpoucke, Danny E. P.
dc.contributor.authorAraujo, Daniel
dc.contributor.authorRouzbahani Bayatani, Rozita
dc.contributor.authorLloret, Fernando
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorHaenen, Ken
dc.contributor.imecauthorRouzbahani Bayatani, Rozita
dc.contributor.imecauthorLloret, Fernando
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidextAraujo, Daniel::0000-0001-7448-1474
dc.contributor.orcidimecNicley, Shannon S.::0000-0002-5960-7873
dc.contributor.orcidimecVanpoucke, Danny E. P.::0000-0001-5919-7336
dc.contributor.orcidimecLloret, Fernando::0000-0002-6506-4027
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.date.accessioned2022-06-20T09:58:27Z
dc.date.available2021-11-02T16:07:03Z
dc.date.available2022-06-20T09:58:27Z
dc.date.issued2021
dc.identifier.doi10.1016/j.carbon.2020.10.061
dc.identifier.issn0008-6223
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38331
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD
dc.source.beginpage463
dc.source.endpage473
dc.source.issuena
dc.source.journalCARBON
dc.source.numberofpages11
dc.source.volume172
dc.subject.keywordsCHEMICAL-VAPOR-DEPOSITION
dc.subject.keywordsELECTRICAL CHARACTERIZATION
dc.subject.keywordsELECTRONIC-PROPERTIES
dc.subject.keywordsRAMAN-SPECTRA
dc.subject.keywordsGROWTH-RATE
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsCONDUCTIVITY
dc.subject.keywordsTEMPERATURE
dc.subject.keywordsSUBSTRATE
dc.subject.keywordsMECHANISM
dc.title

Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers

dc.typeJournal article
dspace.entity.typePublication
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