Publication:
450 mm: from plan to reality
Date
| dc.contributor.author | Lebon, Hans | |
| dc.contributor.imecauthor | Lebon, Hans | |
| dc.date.accessioned | 2021-10-19T15:19:20Z | |
| dc.date.available | 2021-10-19T15:19:20Z | |
| dc.date.issued | 2011 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19264 | |
| dc.source.conference | Semicon West | |
| dc.source.conferencedate | 14/07/2011 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | 450 mm: from plan to reality | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |