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Formation, processing and characterization of Co-Sn intermetallic compounds for potential integration in 3D interconnects
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Formation, processing and characterization of Co-Sn intermetallic compounds for potential integration in 3D interconnects
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Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vakanas, George
;
O, Minho
;
Dimcic, Biljana
;
Vanstreels, Kris
;
Vandecasteele, Bjorn
;
De Preter, Inge
;
Derakhshandeh, Jaber
;
Rebibis, Kenneth June
;
Kajihara, Masanori
;
De Wolf, Ingrid
;
Beyne, Eric
Journal
Microelectronic Engineering
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1938
since deposited on 2021-10-22
Acq. date: 2025-12-12
Citations
Metrics
Views
1938
since deposited on 2021-10-22
Acq. date: 2025-12-12
Citations