Determining the carbon detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)

dc.contributor.author	Merkulov, Alex
dc.contributor.imecauthor	Merkulov, Alex
dc.contributor.orcidimec	Merkulov, Alex::0000-0003-4101-0873
dc.date.accessioned	2025-03-31T11:45:15Z
dc.date.available	2024-10-26T16:45:25Z
dc.date.available	2025-03-31T11:45:15Z
dc.date.issued	2024
dc.identifier.doi	10.1016/j.vacuum.2024.113714
dc.identifier.issn	0042-207X
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/44683
dc.publisher	PERGAMON-ELSEVIER SCIENCE LTD
dc.source.beginpage	Art. 113714
dc.source.endpage	N/A
dc.source.issue	December
dc.source.journal	VACUUM
dc.source.numberofpages	9
dc.source.volume	230
dc.title	Determining the carbon detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)
dc.type	Journal article
dspace.entity.type	Publication
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