Publication:
Mechanical properties of thin deep ultraviolet (DUV) photoresist films after ion implantation
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1859 since deposited on 2021-10-18
1last month
Acq. date: 2026-09-19
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Statistics
Views
1859 since deposited on 2021-10-18
1last month
Acq. date: 2026-09-19
Citations