Publication:
Impact of annealing-induced compaction on electronic properties of atomic-layer-deposited Al2O3
Date
| dc.contributor.author | Afanasiev, Valeri | |
| dc.contributor.author | Stesmans, Andre | |
| dc.contributor.author | Mrstik, B.J. | |
| dc.contributor.author | Zhao, Chao | |
| dc.contributor.imecauthor | Afanasiev, Valeri | |
| dc.contributor.imecauthor | Stesmans, Andre | |
| dc.date.accessioned | 2021-10-14T21:06:57Z | |
| dc.date.available | 2021-10-14T21:06:57Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5937 | |
| dc.source.beginpage | 1678 | |
| dc.source.endpage | 1680 | |
| dc.source.issue | 9 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 81 | |
| dc.title | Impact of annealing-induced compaction on electronic properties of atomic-layer-deposited Al2O3 | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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