Publication:
Molecular beam passivation of Ge and III-V semiconductors for advanced CMOS
Date
| dc.contributor.author | Merckling, Clement | |
| dc.contributor.imecauthor | Merckling, Clement | |
| dc.contributor.orcidimec | Merckling, Clement::0000-0003-3084-2543 | |
| dc.date.accessioned | 2021-10-18T19:05:12Z | |
| dc.date.available | 2021-10-18T19:05:12Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17622 | |
| dc.source.conference | 4th International Workshop on "High k Dielectrics on High Mobility Channel Materials" | |
| dc.source.conferencedate | 25/05/2010 | |
| dc.source.conferencelocation | Hsinchu Taiwan | |
| dc.title | Molecular beam passivation of Ge and III-V semiconductors for advanced CMOS | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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