Publication:

RC modeling, scaling trends and mitigation approaches

Date

2018
Proceedings Paper
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dc.contributor.authorCiofi, Ivan
dc.contributor.authorRoussel, Philippe
dc.contributor.authorBaert, Rogier
dc.contributor.authorContino, Antonino
dc.contributor.authorGupta, Anshul
dc.contributor.authorCroes, Kristof
dc.contributor.authorWilson, Chris
dc.contributor.authorMocuta, Dan
dc.contributor.authorTokei, Zsolt
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2021-10-25T17:17:42Z
dc.date.available2021-10-25T17:17:42Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30427
dc.identifier.urlhttp://mam2018.mdm.imm.cnr.it/MAM2018.pdf
dc.source.beginpage033DII
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate18/03/2018
dc.source.conferencelocationMilano Italy
dc.title

RC modeling, scaling trends and mitigation approaches

dc.typeProceedings paper
dspace.entity.typePublication
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