Publication:

Novel EFFA-based thin-film RF-MEMS technology

Date

2007-06
Proceedings Paper
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dc.contributor.authorRottenberg, Xavier
dc.contributor.authorEkkels, Phillip
dc.contributor.authorBrebels, Steven
dc.contributor.authorWebers, Tomas
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorMertens, Robert
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorPuers, Bob
dc.contributor.authorMarchand, Laurent
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorBrebels, Steven
dc.contributor.imecauthorWebers, Tomas
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecBrebels, Steven::0000-0002-1568-0286
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-16T19:13:51Z
dc.date.available2021-10-16T19:13:51Z
dc.date.issued2007-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12813
dc.source.beginpage145
dc.source.conferenceTransducers & Eurosensors '07: The 14th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate10/06/2007
dc.source.conferencelocationLyon France
dc.source.endpage148
dc.title

Novel EFFA-based thin-film RF-MEMS technology

dc.typeProceedings paper
dspace.entity.typePublication
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