Publication:
The Editorial
| dc.contributor.author | Dusa, Mircea | |
| dc.contributor.imecauthor | Dusa, Mircea | |
| dc.contributor.orcidimec | Dusa, Mircea::0009-0000-3384-8540 | |
| dc.date.accessioned | 2023-08-02T10:15:39Z | |
| dc.date.available | 2023-06-24T19:58:55Z | |
| dc.date.available | 2023-08-02T10:15:39Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2023 | |
| dc.identifier.doi | 10.1109/TSM.2023.3267712 | |
| dc.identifier.issn | 0894-6507 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42080 | |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | |
| dc.source.beginpage | 158 | |
| dc.source.endpage | 158 | |
| dc.source.issue | 2 | |
| dc.source.journal | IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | |
| dc.source.numberofpages | 1 | |
| dc.source.volume | 36 | |
| dc.title | The Editorial | |
| dc.type | Editorial material | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |