Publication:
Cobalt pre-metallization clean and functional water rinse in BEOL interconnect
Date
| dc.contributor.author | Kesters, Els | |
| dc.contributor.author | Le, Quoc Toan | |
| dc.contributor.author | van der Veen, Marleen | |
| dc.contributor.author | Akanishi, Yuya | |
| dc.contributor.author | Hideaki, Iino | |
| dc.contributor.author | Mizutani, Atsushi | |
| dc.contributor.author | Holsteyns, Frank | |
| dc.contributor.imecauthor | Kesters, Els | |
| dc.contributor.imecauthor | Le, Quoc Toan | |
| dc.contributor.imecauthor | van der Veen, Marleen | |
| dc.contributor.imecauthor | Akanishi, Yuya | |
| dc.contributor.imecauthor | Hideaki, Iino | |
| dc.contributor.imecauthor | Holsteyns, Frank | |
| dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
| dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
| dc.date.accessioned | 2021-10-27T11:16:31Z | |
| dc.date.available | 2021-10-27T11:16:31Z | |
| dc.date.issued | 2019 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/33268 | |
| dc.source.conference | Surface Preparation and Cleaning Conference (SPCC 2019) | |
| dc.source.conferencedate | 2/04/2019 | |
| dc.source.conferencelocation | Portland, OR USA | |
| dc.title | Cobalt pre-metallization clean and functional water rinse in BEOL interconnect | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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