Publication:
Self-assembled monolayers as ALD Ru growth inhibitor in an area-selective bottom-up metallization scheme
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1876 since deposited on 2021-10-28
1last month
Acq. date: 2026-02-28
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Statistics
Views
1876 since deposited on 2021-10-28
1last month
Acq. date: 2026-02-28
Citations