Publication:
Self-assembled monolayers as ALD Ru growth inhibitor in an area-selective bottom-up metallization scheme
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1875 since deposited on 2021-10-28
3last month
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Acq. date: 2025-12-16
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Views
1875 since deposited on 2021-10-28
3last month
1last week
Acq. date: 2025-12-16
Citations