Publication:
Self-assembled monolayers as ALD Ru growth inhibitor in an area-selective bottom-up metallization scheme
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1876 since deposited on 2021-10-28
Acq. date: 2026-04-06
Citations
Statistics
Views
1876 since deposited on 2021-10-28
Acq. date: 2026-04-06
Citations