Publication:

Towards Enabling Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic: Fabrication, Characterization and Electrical Measurements of Superconducting NbxTi(1-x)N

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924 since deposited on 2023-08-07
Acq. date: 2025-10-23

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924 since deposited on 2023-08-07
Acq. date: 2025-10-23

Citations