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Towards Enabling Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic: Fabrication, Characterization and Electrical Measurements of Superconducting NbxTi(1-x)N
Publication:
Towards Enabling Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic: Fabrication, Characterization and Electrical Measurements of Superconducting NbxTi(1-x)N
Date
2023
Proceedings Paper
https://doi.org/10.1109/IITC/MAM57687.2023.10154725
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pokhrel, Ankit
;
Gupta, Anshul
;
Kim, Min-Soo
;
Soulie, Jean-Philippe
;
Sarkar, Sujan Kumar
;
Canvel, Yann
;
Renaud, Vincent
;
Kenens, Bart
;
Hodges, Blake
;
Josephsen, Trent
;
O'Neal, Sabine
;
Herr, Quentin
;
Herr, Anna
;
Tokei, Zsolt
Journal
N/A
Abstract
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Views
924
since deposited on 2023-08-07
Acq. date: 2025-10-23
Citations
Metrics
Views
924
since deposited on 2023-08-07
Acq. date: 2025-10-23
Citations