Publication:

Grand Challenges in Nanofabrication: There Remains Plenty of Room at the Bottom

Date

2021
Editorial Material
https://doi.org/10.3389/fnano.2021.700849
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dc.contributor.authorFourkas, John. T. T.
dc.contributor.authorGao, Jinwei
dc.contributor.authorHan, Zheng
dc.contributor.authorLiu, Haitao
dc.contributor.authorMarmiroli, Benedetta
dc.contributor.authorNaughton, Michael. J. J.
dc.contributor.authorPetersen, John
dc.contributor.authorSun, Yong
dc.contributor.authorPret, Alex Vagilio
dc.contributor.authorZheng, Yuebing
dc.contributor.imecauthorPetersen, John
dc.contributor.orcidextGao, Jinwei::0000-0002-4545-1126
dc.contributor.orcidextLiu, Haitao::0000-0002-8598-1076
dc.date.accessioned2023-06-22T13:24:19Z
dc.date.available2023-06-20T10:37:16Z
dc.date.available2023-06-22T13:24:19Z
dc.date.embargo2021-10-07
dc.date.issued2021
dc.identifier.doi10.3389/fnano.2021.700849
dc.identifier.issn2673-3013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41971
dc.publisherFRONTIERS MEDIA SA
dc.source.beginpageArt. 700849
dc.source.endpagena
dc.source.issuena
dc.source.journalFRONTIERS IN NANOTECHNOLOGY
dc.source.numberofpages4
dc.source.volume3
dc.subject.keywordsLITHOGRAPHY
dc.title

Grand Challenges in Nanofabrication: There Remains Plenty of Room at the Bottom

dc.typeEditorial material
dspace.entity.typePublication
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