Publication:
Evaluating k-values for low-k materials after damascene integration: method and results for 90nm half pitch
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1969 since deposited on 2021-10-18
1last month
Acq. date: 2026-08-08
Citations
Statistics
Views
1969 since deposited on 2021-10-18
1last month
Acq. date: 2026-08-08
Citations