Publication:

EUV vote-taking lithography: Crazy.... or not ?

Date

2018
Proceedings Paper
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dc.contributor.authorBekaert, Joost
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorBeral, Christophe
dc.contributor.authorHendrickx, Eric
dc.contributor.authorvan de Kerkhof, Mark A.
dc.contributor.authorBouten, Sander
dc.contributor.authorKupers, Michiel
dc.contributor.authorSchiffelers, Guido
dc.contributor.authorVerduijn, Erik
dc.contributor.authorBrunner, Timothy
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorBeral, Christophe
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorSchiffelers, Guido
dc.contributor.imecauthorVerduijn, Erik
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecBeral, Christophe::0000-0003-1356-9186
dc.date.accessioned2021-10-25T16:41:58Z
dc.date.available2021-10-25T16:41:58Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30227
dc.identifier.urlhttps://doi.org/10.1117/12.2299509
dc.source.beginpage105830I
dc.source.conferenceExtreme Ultraviolet (EUV) Lithography IX
dc.source.conferencedate26/02/2018
dc.source.conferencelocationSan Jose, CA USA
dc.title

EUV vote-taking lithography: Crazy.... or not ?

dc.typeProceedings paper
dspace.entity.typePublication
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