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Self-focusing SIMS: A metrology solution to area selective deposition
Publication:
Self-focusing SIMS: A metrology solution to area selective deposition
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Date
2019
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Spampinato, Valentina
;
Armini, Silvia
;
Franquet, Alexis
;
Conard, Thierry
;
van der Heide, Paul
;
Vandervorst, Wilfried
Journal
Applied Surface Science
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1806
since deposited on 2021-10-27
1
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Acq. date: 2025-12-15
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Metrics
Views
1806
since deposited on 2021-10-27
1
last month
Acq. date: 2025-12-15
Citations