Publication:

Characterisation of AlCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy

Date

2002
Journal article
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dc.contributor.authorNohira, Hiroshi
dc.contributor.authorTsai, Wilman
dc.contributor.authorBesling, Wim
dc.contributor.authorYoung, Edward
dc.contributor.authorPétry, Jasmine
dc.contributor.authorConard, Thierry
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorMaes, Jos
dc.contributor.authorTuominen, Marko
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-14T22:33:19Z
dc.date.available2021-10-14T22:33:19Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6649
dc.source.beginpage83
dc.source.endpage87
dc.source.issue1
dc.source.journalJournal of Non-Crystalline Solids
dc.source.volume303
dc.title

Characterisation of AlCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy

dc.typeJournal article
dspace.entity.typePublication
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