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Improved depth information from routine analysis of the inelastic background of XPS and HAXPES spectra using optimized two- and three-parameter cross-sections

Date

2022
Journal article
https://doi.org/10.1002/sia.7020
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dc.contributor.authorZborowski, Charlotte
dc.contributor.authorTougaard, Sven
dc.contributor.imecauthorZborowski, Charlotte
dc.contributor.orcidextTougaard, Sven::0000-0003-0909-8764
dc.date.accessioned2023-01-19T14:22:33Z
dc.date.available2021-11-02T15:56:45Z
dc.date.available2023-01-19T14:22:33Z
dc.date.issued2022
dc.identifier.doi10.1002/sia.7020
dc.identifier.issn0142-2421
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37539
dc.publisherWILEY
dc.source.beginpage433
dc.source.endpage441
dc.source.issue4
dc.source.journalSURFACE AND INTERFACE ANALYSIS
dc.source.numberofpages9
dc.source.volume54
dc.subject.keywordsENERGY-LOSS
dc.subject.keywordsQUANTIFICATION
dc.subject.keywordsAES
dc.title

Improved depth information from routine analysis of the inelastic background of XPS and HAXPES spectra using optimized two- and three-parameter cross-sections

dc.typeJournal article
dspace.entity.typePublication
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