Publication:

Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3011279
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dc.contributor.authorBeggiato, Matteo
dc.contributor.authorCerbu, Dorin
dc.contributor.authorLoo, Roger
dc.contributor.authorSun, W.
dc.contributor.authorMoussa, Alain
dc.contributor.authorBast, G.
dc.contributor.authorFukaya, K.
dc.contributor.authorBeral, Christophe
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorJanardan, N.
dc.contributor.authorCross, A.
dc.contributor.authorLorusso, Gian
dc.contributor.authorIsawa, M.
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.imecauthorBeggiato, M.
dc.contributor.imecauthorCerbu, D.
dc.contributor.imecauthorLoo, R.
dc.contributor.imecauthorMoussa, A.
dc.contributor.imecauthorBeral, C.
dc.contributor.imecauthorCharley, A-L.
dc.contributor.imecauthorJanardan, N.
dc.contributor.imecauthorLorusso, G.
dc.contributor.imecauthorBelmonte, A.
dc.contributor.imecauthorKar, G. Sankar
dc.contributor.imecauthorBogdanowicz, J.
dc.date.accessioned2024-06-15T17:25:54Z
dc.date.available2024-06-15T17:25:54Z
dc.date.issued2024
dc.identifier.doi10.1117/12.3011279
dc.identifier.eisbn978-1-5106-7217-8
dc.identifier.isbn978-1-5106-7216-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44055
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage129551F
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVIII
dc.source.conferencedate2024-02-28
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages9
dc.subject.keywordsTHREADING DISLOCATIONS
dc.subject.keywordsMISFIT
dc.title

Detection of crystalline defects in Si/SiGe superlattices towards 3D-DRAM applications

dc.typeProceedings paper
dspace.entity.typePublication
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