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Thermo-mechanical stability of 3-D SrBi2Ta2O9 ferroelectric capacitors

Date

2004
Meeting abstract
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dc.contributor.authorLisoni, Judit
dc.contributor.authorWafer, K.
dc.contributor.authorJohnson, J.A.
dc.contributor.authorVandevelde, Bart
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorGoux, Ludovic
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorCaputa, Concetta
dc.contributor.authorZambrano, R.
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.date.accessioned2021-10-15T14:31:04Z
dc.date.available2021-10-15T14:31:04Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/9214
dc.source.beginpage1-10-P
dc.source.conferenceAbstracts 16th International Symposium on Integrated Ferroelectrics
dc.source.conferencedate5/04/2004
dc.source.conferencelocationGyeongju Korea
dc.title

Thermo-mechanical stability of 3-D SrBi2Ta2O9 ferroelectric capacitors

dc.typeMeeting abstract
dspace.entity.typePublication
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